particle collector

Particle Collector

Proposal on System Construction for CVD-C #5, #6, #7, #8

＊CVD-C has 1-Ch and 1-LL and 1-UL. ＊G8 has 6-inlet port.

Outline on Proposal

Reaction on combustion abatement ：
SiH4：SiH4+2O2→SiO2+2H2O
PH3：2PH3+4O2→P2O5+3H2O
H2：2H2+O2→2H2O
NF3：4NF3+3CH4+3O2→2N2+3CO2+12HF
TMB, B2H6：2B+1/2 5O2 →B2O5, 2B+1/2 3O2→B2O3
DEZ：Zn+O2 →ZnO2

Combustion Abatement Device-FEATURES(5)-

Security Feature on Hydrogen Application → Patented Original Technology