GAS Exhausting System
Local Scrubber
Local Scrubber-CVD / Local Scrubber-ET
![Local Scrubber-CVD](https://www.wincome.com.tw/wp-content/uploads/2018/03/Local-Scrubber-CVD.png)
Local Scrubber-CVD
Combustion Abatement Device
GUARDIAN
GUARDIAN Series
Applicable to gases of CVD・Dry Etch
![00](https://www.wincome.com.tw/wp-content/uploads/2018/03/00.png)
G – type GUARDIAN Outline
![01](https://www.wincome.com.tw/wp-content/uploads/2018/03/01.png)
G – type GUARDIAN Structure
![02](https://www.wincome.com.tw/wp-content/uploads/2018/03/02.png)
Flashback Arrestor (F・B・A)
[Flashback]The flashback means the fire back to the upper line
[The Cause]①Plumbing line leakage
②back-flow caused by the dry pump
[FBA System]The thermal sensor at the inlet line detects the temperature rise and supply N2 to the plumbing line
![04](https://www.wincome.com.tw/wp-content/uploads/2018/03/04.png)
Local Scrubber-ET
Exhausted gases Abatement Feature of GUARDIANSystem.
GUARDIAN Series
Applicable to gases of CVD・Dry Etch
![00](https://www.wincome.com.tw/wp-content/uploads/2018/03/00.png)
F – type GUARDIAN Outline
![05](https://www.wincome.com.tw/wp-content/uploads/2018/03/05.png)
F – type GUARDIAN (WBW) Structure
![06](https://www.wincome.com.tw/wp-content/uploads/2018/03/06.png)