Local Scrubber

Local Scrubber-CVD

Combustion Abatement Device
GUARDIAN

GUARDIAN Series

Applicable to gases of CVD・Dry Etch

G – type GUARDIAN Outline

G – type GUARDIAN Structure

Flashback Arrestor (F･B･A)

[Flashback]The flashback means the fire back to the upper line
[The Cause]①Plumbing line leakage
②back-flow caused by the dry pump
[FBA System]The thermal sensor at the inlet line detects the temperature rise and supply N2 to the plumbing line

Local Scrubber-ET

Exhausted gases Abatement Feature of GUARDIANSystem.

GUARDIAN Series

Applicable to gases of CVD・Dry Etch

F – type GUARDIAN Outline

F – type GUARDIAN (WBW) Structure